SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Tuesday 18 October 1994)] Microelectronics Technology and Process Integration - Laser-induced microfracture leading to high-density metal-to-metal connections
Bernstein, Joseph B., Ventura, Thomas M., Radomski, Aaron T., Chen, Fusen E., Murarka, Shyam P.Volume:
2335
Year:
1994
Language:
english
DOI:
10.1117/12.186055
File:
PDF, 808 KB
english, 1994