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SPIE Proceedings [SPIE SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation - San Diego, CA (Sunday 24 July 1994)] Integrated Optics and Microstructures II - Integrated optical interferometer with micromechanical diaphragm for pressure sensing
De Brabander, Gregory N., Boyd, Joseph T., Beheim, Glenn, Tabib-Azar, Massood, Polla, Dennis L., Wong, Ka-KhaVolume:
2291
Year:
1994
Language:
english
DOI:
10.1117/12.190902
File:
PDF, 242 KB
english, 1994