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SPIE Proceedings [SPIE Eighth International Conference on Thin Film Physics and Applications (TFPA13) - Shanghai, China (Friday 20 September 2013)] Eighth International Conference on Thin Film Physics and Applications - Thin film poly-crystalline silicon fabrication based on Rapid Thermal Annealing (RTA) process
Qian, Jun, Li, Jirong, Liao, Yang, Shi, Weimin, Kuang, Huahui, Ming, Xiuchun, Liu, Jin, Jin, Jing, Qin, Juan, Chu, Junhao, Wang, ChunruiVolume:
9068
Year:
2013
Language:
english
DOI:
10.1117/12.2054037
File:
PDF, 595 KB
english, 2013