SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 23 October 1995)] Micromachining and Microfabrication Process Technology - SOI-based micromechanical process
Greiff, Paul, Markus, Karen W.Volume:
2639
Year:
1995
Language:
english
DOI:
10.1117/12.221266
File:
PDF, 418 KB
english, 1995