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SPIE Proceedings [SPIE San Dieg - DL Tentative - San Diego, CA (Sunday 1 July 1990)] X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography - Resist schemes for soft x-ray lithography
Taylor, Gary N., Hutton, Richard S., Windt, David L., Mansfield, William M., Hoover, Richard B., Walker II, Arthur B. C.Volume:
1343
Year:
1991
Language:
english
DOI:
10.1117/12.23198
File:
PDF, 793 KB
english, 1991