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SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Microlithography and Metrology in Micromachining II - Commercializing MEMS--too fast or too slow? (Same as Vols. 2881 and 2882, p. 12)
Walsh, S., Carr, W. N., Mados, H., Narang, D. S., Postek, Jr., Michael T., Friedrich, Craig R.Volume:
2880
Year:
1996
Language:
english
DOI:
10.1117/12.250966
File:
PDF, 753 KB
english, 1996