![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Brazil - DL tentative - Sao Paulo, Brazil (Sunday 1 July 1990)] 5th Congress of the Brazilian Society of Microelectronics - Versatile ion implanter for submicron and 3-D device engineering
Dykstra, Jerald P., Ray, Andy M., Simonton, Robert, Baranauskas, VitorVolume:
1405
Year:
1990
Language:
english
DOI:
10.1117/12.26300
File:
PDF, 570 KB
english, 1990