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SPIE Proceedings [SPIE Smart Structures and Materials '97 - San Diego, CA (Monday 3 March 1997)] Smart Structures and Materials 1997: Smart Materials Technologies - Ti(C,N) film formed by ion-beam-assisted deposition
Liu, Han-wei, Chen, Yunru, Cai, Hai-Tao, Simmons, Wilbur C., Aksay, Ilhan A., Huston, Dryver R.Volume:
3040
Year:
1997
Language:
english
DOI:
10.1117/12.267126
File:
PDF, 344 KB
english, 1997