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SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] Microelectronic Device Technology - Hot-carrier degradation for deep-submicron N-MOSFETs introduced by back-end processing
Lie, Donald Y. C., Xia, Wei, Yota, Jiro, Joshi, Atul B., Zwingman, R., Williams, R., Kerametlian, V., Cerney, Dennis, Min, Byoung W., Kwong, Dim-Lee, Rodder, Mark, Tsuchiya, Toshiaki, Burnett, David,Volume:
3212
Year:
1997
Language:
english
DOI:
10.1117/12.284599
File:
PDF, 300 KB
english, 1997