SPIE Proceedings [SPIE Far East and Pacific Rim Symposium on Smart Materials, Structures, and MEMS - Adelaide, Australia (Wednesday 10 December 1997)] Smart Electronics and MEMS - Laterally self-oscillated and force-balanced microvibratory gyroscope packaged in a vacuum package with a conditioning ASIC
Park, Kyu-Yeon, Lee, Chong-Won, Oh, Yong-Soo, Lee, Byeungleul, Hariz, Alex, Varadan, Vijay K., Reinhold, OlafVolume:
3242
Year:
1997
Language:
english
DOI:
10.1117/12.293579
File:
PDF, 761 KB
english, 1997