SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Sunday 20 September 1998)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV - More-effective troubleshooting using data collection on etch equipment: case studies
Durham, James, Felker, Steve, Shelton, Steven F., Toprac, Anthony J., Dang, KimVolume:
3507
Year:
1998
Language:
english
DOI:
10.1117/12.324364
File:
PDF, 308 KB
english, 1998