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SPIE Proceedings [SPIE International Symposium on Photonics and Applications - Singapore, Singapore (Monday 29 November 1999)] Advanced Photonic Sensors and Applications - Development of a pyroelectric thin film infrared sensor by micro-opto-electro-mechanical system (MOEMS) technology
Ho, Jyh-Jier, Fang, Yuen Keun, Hsieh, M. C., Chen, Chin-Ying, Ting, S. F., Lin, S. M., Wu, K. H., Lieberman, Robert A., Asundi, Anand K., Asanuma, HiroshiVolume:
3897
Year:
1999
Language:
english
DOI:
10.1117/12.369329
File:
PDF, 361 KB
english, 1999