SPIE Proceedings [SPIE Third International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering - St. Petersburg, Russia (Monday 7 June 1999)] Third International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering - Characterization of silicon carbide epitaxial films by differential reflectance spectroscopy
Shturbin, Anatoly V., Titkov, Ilya E., Panevin, Vadim Y., Vorobjev, Leonid E., Witman, Renata F., Melker, Alexander I.Volume:
4064
Year:
2000
Language:
english
DOI:
10.1117/12.375465
File:
PDF, 214 KB
english, 2000