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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachining and Microfabrication Process Technology VI - Formation of low-stress multilayered thick polysilicon films for fabrication of microsystems
Choi, Chang-Auck, Jang, Won-Ick, Lee, Myung-Lae, Kim, Youn Tae, Karam, Jean Michel, Yasaitis, John A.Volume:
4174
Year:
2000
Language:
english
DOI:
10.1117/12.396447
File:
PDF, 804 KB
english, 2000