SPIE Proceedings [SPIE Laser-Assisted Microtechnology 2000 - St. Petersburg-Pushkin, Russia (Wednesday 23 August 2000)] Laser-Assisted Microtechnology 2000 - Optoelectronic methods for detecting a surface defect and estimation of their parameters by coherent illumination
Proskurin, Dmitry K., Khromykh, V. G., Orlov, A. S., Veiko, Vadim P.Volume:
4157
Year:
2001
Language:
english
DOI:
10.1117/12.413754
File:
PDF, 628 KB
english, 2001