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SPIE Proceedings [SPIE Smart Materials and MEMS - Melbourne, Australia (Wednesday 13 December 2000)] Smart Structures and Devices - Si-based print circuit board fabricated by Si deep etching and metal powder injection molding
Maeda, Ryutaro, Murakoshi, Yoichi, Shimizu, Toru, Li, Yaomin, Takizawa, Hiroyuki, Sood, Dinesh K., Lawes, Ronald A., Varadan, Vasundara V.Volume:
4235
Year:
2001
DOI:
10.1117/12.420860
File:
PDF, 554 KB
2001