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SPIE Proceedings [SPIE Photonics West 2001 - LASE - San Jose, CA (Saturday 20 January 2001)] Laser Applications in Microelectronic and Optoelectronic Manufacturing VI - Submicron structuring of solid targets with femtosecond laser pulses
Korte, Frank, Nolte, Stefan, Chichkov, Boris N., Fallnich, Carsten, Tuennermann, Andreas, Welling, Herbert, Gower, Malcolm C., Helvajian, Henry, Sugioka, Koji, Dubowski, Jan J.Volume:
4274
Year:
2001
Language:
english
DOI:
10.1117/12.432502
File:
PDF, 578 KB
english, 2001