SPIE Proceedings [SPIE Photonics West 2001 - LASE - San Jose, CA (Saturday 20 January 2001)] Laser Applications in Microelectronic and Optoelectronic Manufacturing VI - PLD of hard ceramic coatings
Perera, Yibran, Gottmann, Jens, Husmann, Andreas, Klotzbuecher, Thomas, Kreutz, Ernst-Wolfgang, Poprawe, Reinhart, Gower, Malcolm C., Helvajian, Henry, Sugioka, Koji, Dubowski, Jan J.Volume:
4274
Year:
2001
DOI:
10.1117/12.432550
File:
PDF, 468 KB
2001