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SPIE Proceedings [SPIE International Conference on Sensing units and Sensor Technology - Wuhan, China (Wednesday 10 October 2001)] International Conference on Sensor Technology (ISTC 2001) - Stress relaxation of the micromachined coplanar waveguide
Shi, Yanling, Lai, Zongsheng, Xin, Peisheng, Zhou, Yikai, Xu, ShunqingVolume:
4414
Year:
2001
Language:
english
DOI:
10.1117/12.440196
File:
PDF, 308 KB
english, 2001