SPIE Proceedings [SPIE Photonics Asia 2002 - Shanghai, China (Monday 14 October 2002)] MEMS/MOEMS Technologies and Applications - Optimum design of levitating coil and stability coils in the micromachined gyroscope of electromagnetic levitated rotor
Wu, Xiaosheng, Chen, Wenyuan, Zhang, Weiping, Jin, Guofan, McKillop, John S., Hane, KazuhiroVolume:
4928
Year:
2002
Language:
english
DOI:
10.1117/12.483158
File:
PDF, 340 KB
english, 2002