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SPIE Proceedings [SPIE Advanced Microelectronic Manufacturing - Santa Clara, CA (Sunday 23 February 2003)] Process and Materials Characterization and Diagnostics in IC Manufacturing - LithoCell-integrated critical dimension metrology
Stirton, J. B., Miller, Clinton W., Viswanathan, Anita, Miyagi, Makoto, Lane, Lawrence, Laughery, Michael A., Parikh, Tarun, Chan, Kin Chung, Sezginer, Apo, Tobin, Jr., Kenneth W., Emami, IrajVolume:
5041
Year:
2003
Language:
english
DOI:
10.1117/12.485241
File:
PDF, 264 KB
english, 2003