SPIE Proceedings [SPIE 19th European Conference on Mask Technology for Integrated Circuits and Microcomponts - Sonthofen, Germany (Monday 13 January 2003)] 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Development and characterization of new CD mask standards: a status report
Schatz, Thomas, Hauffe, Bertram, Dobereiner, Stefan, Bruck, Hans-Jurgen, Brendel, Bernd, Bettin, Lutz, Roth, Klaus-Dieter, Steinberg, Walter, Speckbacher, Peter, Sedlmeier, Wolfgang, Engel, Thomas, HaVolume:
5148
Year:
2003
Language:
english
DOI:
10.1117/12.514952
File:
PDF, 1.03 MB
english, 2003