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SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, Ca (Sunday 25 January 2004)] Photon Processing in Microelectronics and Photonics III - Surface microfabrication of fused silica glass by UV laser irradiation
Niino, Hiroyuki, Kawaguchi, Yoshizo, Sato, Tadatake, Narazaki, Aiko, Ding, Ximing, Kurosaki, Ryozo, Herman, Peter R., Fieret, Jim, Pique, Alberto, Okada, Tatsuo, Bachmann, Friedrich G., Hoving, WillemVolume:
5339
Year:
2004
Language:
english
DOI:
10.1117/12.529864
File:
PDF, 1.36 MB
english, 2004