SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Packaging and characterization of micro-opto-electro-mechanical systems
Saupe, Ray, Otto, Thomas, Stock, Volker, Fritzsch, Uwe, Gessner, Thomas, Pistora, Jaromir, Postava, Kamil, Hrabovsky, Miroslav, Rawat, Banmali S.Year:
2012
Language:
english
DOI:
10.1117/12.558489
File:
PDF, 211 KB
english, 2012