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SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] MEMS/MOEMS Components and Their Applications II - Investigation of actuation behavior for microarray thermal actuator based upon electrical analysis
Tsai, Chien-Chung, Henning, Albert K., Yang, Tsa-Hsien, Huang, Yi-ChaoVolume:
5717
Year:
2005
Language:
english
DOI:
10.1117/12.589574
File:
PDF, 680 KB
english, 2005