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SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Advances in Resist Technology and Processing XXII - Hybrid BARC approaches for FEOL and BEOL intergration
Perez, Willie, Sturtevant, John L., Turner, Stephen, Brakensiek, Nick, Mills, Lynne, Wilson, Larry, Popa, PaulVolume:
5753
Year:
2005
Language:
english
DOI:
10.1117/12.598765
File:
PDF, 2.09 MB
english, 2005