SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA...

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SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Design and Process Integration for Microelectronic Manufacturing III - Modeling within-field gate length spatial variation for process-design co-optimization

Friedberg, Paul, Liebmann, Lars W., Cao, Yu, Cain, Jason, Wang, Ruth, Rabaey, Jan, Spanos, Costas
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Volume:
5756
Year:
2005
Language:
english
DOI:
10.1117/12.600028
File:
PDF, 765 KB
english, 2005
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