SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2005 - Sevilla, Spain (Monday 9 May 2005)] Smart Sensors, Actuators, and MEMS II - CAD tool environment for MEMS process design support
Schmidt, T., Wagener, A., Popp, J., Hahn, K., Bruck, R., Cane, Carles, Chiao, Jung-Chih, Vidal Verdu, FernandoVolume:
5836
Year:
2005
Language:
english
DOI:
10.1117/12.608517
File:
PDF, 1.61 MB
english, 2005