SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] MEMS/MOEMS Components and Their Applications III - Large stroke actuators for adaptive optics
Fernández, B., Kubby, J. A., Olivier, Scot S., Tadigadapa, Srinivas A., Henning, Albert K.Volume:
6113
Year:
2006
Language:
english
DOI:
10.1117/12.644796
File:
PDF, 314 KB
english, 2006