SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 21 January 2006)] Photon Processing in Microelectronics and Photonics V - Inspection of defects and metallic contamination in SiGe:B CMOS using an in-line photoluminescence monitor
Liao, Chin-I, Buczkowski, Andrzej, Chien, C. C., Huang, K. T., Li, Zhiqiang, Walker, Tom, Hummel, Steve G., Tzou, S. F., Okada, Tatsuo, Arnold, Craig B., Meunier, Michel, Holmes, Andrew S., Geohegan,Volume:
6106
Year:
2006
Language:
english
DOI:
10.1117/12.645605
File:
PDF, 726 KB
english, 2006