SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] Micromachining and Microfabrication Process Technology XI - Enhancement of structural stiffness in MEMS structures
Ilias, Samir, Picard, Francis, Topart, Patrice, Larouche, Carl, Jerominek, Hubert, Maher, Mary-Ann, Stewart, Harold D., Chiao, Jung-ChihVolume:
6109
Year:
2006
Language:
english
DOI:
10.1117/12.648409
File:
PDF, 514 KB
english, 2006