SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Brisbane, Australia (Sunday 11 December 2005)] Microelectronics: Design, Technology, and Packaging II - Specific contact resistivity of Al-NiSi contacts using Cross Kelvin Resistor test structure chains
Holland, Anthony S., Bhaskaran, Madhu, Sriram, Sharath, Reeves, Geoffrey K., Ravichandran, Vykundh, Borase, Vishal D., Bhaskaran, Shreekkanth, Hariz, Alex J.Volume:
6035
Year:
2006
Language:
english
DOI:
10.1117/12.650699
File:
PDF, 344 KB
english, 2006