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SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Research on mechanism of DOE influence on fractal nano-dimensional films production
Zhabrev, Valentin A., Lukyanov, Gennady N., Margolin, Vladimir I., Potekhin, Maxim S., Serov, Igor N., Soltovskaya, Inga A., Tupik, Viktor A., Privalov, Vadim E.Year:
2012
Language:
english
DOI:
10.1117/12.677738
File:
PDF, 631 KB
english, 2012