![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Integrated Optoelectronic Devices 2007 - San Jose, CA (Saturday 20 January 2007)] Optoelectronic Integrated Circuits IX - Nano patterning fabrication by low energy microcolumn lithography
Yoshimoto, Takatoshi, Eldada, Louay A., Lee, El-Hang, Hwang, Seok Hyun, Kim, Kyong Hon, Seong, Do Jin, Kim, Dea Wook, Kim, Young Chul, Ahn, Seung Jun, Kim, Ho SeobVolume:
6476
Year:
2007
Language:
english
DOI:
10.1117/12.707374
File:
PDF, 699 KB
english, 2007