SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - The design and fabrication of an optical fiber MEMS pressure sensor
Ge, Yixian, Wang, Ming, Rong, Hua, Chen, Xuxing, Kulchin, Yuri N., Ou, Jinping, Vitrik, Oleg B., Zhou, ZhiYear:
2012
Language:
english
DOI:
10.1117/12.726498
File:
PDF, 345 KB
english, 2012