SPIE Proceedings [SPIE Photonics Europe - Strasbourg,...

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SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 7 April 2008)] Micro-Optics 2008 - A novel method for fabricating an optical grating element with a fine grating pitch

Thienpont, Hugo, Chiu, Kuo-Chi, Chang, Sheng-Li, Van Daele, Peter, Mohr, Jürgen, Hsu, Ming-Fang, Taghizadeh, Mohammad R.
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Volume:
6992
Year:
2008
Language:
english
DOI:
10.1117/12.780460
File:
PDF, 924 KB
english, 2008
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