SPIE Proceedings [SPIE Optical Engineering + Applications -...

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SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 10 August 2008)] Two- and Three-Dimensional Methods for Inspection and Metrology VI - Development of real-time shape measurement system using whole-space tabulation method

Fujigaki, Motoharu, Huang, Peisen S., Yoshizawa, Toru, Takagishi, Akihiro, Matui, Toru, Harding, Kevin G., Morimoto, Yoshiharu
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Volume:
7066
Year:
2008
Language:
english
DOI:
10.1117/12.795300
File:
PDF, 789 KB
english, 2008
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