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SPIE Proceedings [SPIE SPIE MOEMS-MEMS: Micro- and Nanofabrication - San Jose, CA (Saturday 24 January 2009)] Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II - E-beam assisted fabrication of a subwavelength aluminum mesh
Mazuir, Clarisse, Suleski, Thomas J., Schoenfeld, Winston V., Deng, J. Thomas, Hwang, Jim C. M., Wang, Jian J., Schoenfeld, Winston V.Volume:
7205
Year:
2009
Language:
english
DOI:
10.1117/12.809833
File:
PDF, 3.98 MB
english, 2009