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SPIE Proceedings [SPIE Smart Materials, Nano-and Micro-Smart Systems - Melbourne, Australia (Tuesday 9 December 2008)] Smart Structures, Devices, and Systems IV - Effective diaphragm area of spring-supported capacitive MEMS microphone designs
Al-Sarawi, Said F., Mohamad, Norizan, Iovenitti, Pio, Varadan, Vijay K., Weste, Neil, Vinay, Thurai, Kalantar-Zadeh, KouroshVolume:
7268
Year:
2008
Language:
english
DOI:
10.1117/12.810575
File:
PDF, 364 KB
english, 2008