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SPIE Proceedings [SPIE Photomask and NGL Mask Technology XVII - Yokohama, Japan (Tuesday 13 April 2010)] Photomask and Next-Generation Lithography Mask Technology XVII - Fabrication of ridge-and-groove servo pattern consisting of self-assembled dots for high-density bit patterned media
Kamata, Yoshiyuki, Hosono, Kunihiro, Kikitsu, Akira, Kihara, Naoko, Morita, Seiji, Kimura, Kaori, Izumi, HaruhikoVolume:
7748
Year:
2010
Language:
english
DOI:
10.1117/12.863873
File:
PDF, 538 KB
english, 2010