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SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California (Saturday 22 January 2011)] Silicon Photonics VI - Low-energy silicon-on-insulator ion implanted gratings for optical wafer scale testing
Loiacono, Renzo, Kubby, Joel A., Reed, Graham T., Reed, Graham T., Mashanovich, Goran Z., Gwilliam, Russell M., Lulli, Giorgio, Feldesh, Ran, Jones, RichardVolume:
7943
Year:
2011
Language:
english
DOI:
10.1117/12.873288
File:
PDF, 930 KB
english, 2011