SPIE Proceedings [SPIE 27th European Mask and Lithography Conference - Dresden, Germany (Tuesday 18 January 2011)] 27th European Mask and Lithography Conference - Use of scatterometry for scanner matching
Bald, Holger, Behringer, Uwe F.W., Seltmann, Rolf, Bubke, Karsten, Ruhm, Matthias, Noot, Marc, Woischke, Dieter, van Adrichem, Paul, Luehrmann, PaulVolume:
7985
Year:
2011
Language:
english
DOI:
10.1117/12.886120
File:
PDF, 449 KB
english, 2011