![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE 1986 International Symposium/Innsbruck - Innsbruck, Austria (Tuesday 15 April 1986)] Thin Film Technologies II - Optical Study Of The Growth Of Ta2O5 and SiO2 Layers Obtained By Ion Assisted Deposition
Flory, F, Albrand, G, Montelymard, C, Pelletier, E, Jacobsson, J. RolandVolume:
652
Year:
1986
Language:
english
DOI:
10.1117/12.938387
File:
PDF, 236 KB
english, 1986