SPIE Proceedings [SPIE 1986 International Symposium/Innsbruck - Innsbruck, Austria (Tuesday 15 April 1986)] Contemporary Optical Instrument Design, Fabrication, and Testing - Heterodyne Interferometer For Surface Profile Measurements In The Angstrom Region
Pantzer, Dan, Politch, Jacob, Ek, Leif, Beckmann, Leo H. J. F., Briers, J. D., Yoder, Jr., Paul R.Volume:
656
Year:
1986
Language:
english
DOI:
10.1117/12.938482
File:
PDF, 206 KB
english, 1986