SPIE Proceedings [SPIE Hague International Symposium - The Hague, Netherlands (Monday 30 March 1987)] Scanning Imaging Technology - Application Of Confocal Beam Scanning Microscopy To The Measurement Of Submicron Structures
Wijnaendts-van-Resandt, Roelof W., Ihrig, Ch., Balk, Ludwig J., Wilson, TonyVolume:
809
Year:
1987
Language:
english
DOI:
10.1117/12.941504
File:
PDF, 7.15 MB
english, 1987