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SPIE Proceedings [SPIE 1985 Microlithography Conferences - Santa Clara (Monday 11 March 1985)] Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies IV - Performance Testing Of The Waferwriter Tm Electron Beam Direct Write System
Livesay, W. R., Russell, J.Dennis, Harry, Dave, Hulett, James S., Rubiales, A. L., Wolfe, J. E., Blais, Phillip D.Volume:
537
Year:
1985
Language:
english
DOI:
10.1117/12.947480
File:
PDF, 3.16 MB
english, 1985