Characteristics of Nitrogen Doped Diamond-Like Carbon Films Prepared by Unbalanced Magnetron Sputtering for Electronic Devices
Lee, Jaehyeong, Choi, Byung Hui, Yun, Jung-Hyun, Park, Yong SeobVolume:
16
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2016.12225
Date:
May, 2016
File:
PDF, 1.22 MB
english, 2016