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The influence of the surface barrier on the trajectory of sputtered particles
T. G. Abdel-Malik, A. A. Aly, A. M. Abdeen, H. A. MotawehVolume:
116
Year:
1983
Language:
english
Pages:
4
DOI:
10.1002/pssb.2221160121
File:
PDF, 195 KB
english, 1983