[IEEE 2016 China Semiconductor Technology International Conference (CSTIC) - Shanghai, China (2016.3.13-2016.3.14)] 2016 China Semiconductor Technology International Conference (CSTIC) - Floating gate etch profile control for NAND flash memory
Chen, Zhuofan, Zhang, Yiying, Wang, Yan, Ren, Jia, Zhang, HaiyangYear:
2016
Language:
english
DOI:
10.1109/cstic.2016.7463991
File:
PDF, 494 KB
english, 2016