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[IEEE 2016 International Conference on Microelectronic Test Structures (ICMTS) - Yokohama, Japan (2016.3.28-2016.3.31)] 2016 International Conference on Microelectronic Test Structures (ICMTS) - Highly effective and versatile test structure for evaluating dielectric properties using flexible pulse generator on chip
Mori, Shigetaka, Sawada, Ken, Tomita, Manabu, Ogawa, Kazuhisa, Suzuki, Tsuyoshi, Oishi, Hidetoshi, Bairo, Masaaki, Fukuzaki, Yuzo, Ohnuma, HidetoshiYear:
2016
Language:
english
DOI:
10.1109/icmts.2016.7476185
File:
PDF, 8.66 MB
english, 2016